Docking station for substrate transport containers
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United States of America Patent
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Nov 4, 2003
Grant Date -
N/A
app pub date -
Nov 2, 1998
filing date -
Mar 27, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.
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