Microinterferometer for distance measurements
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United States of America Patent
Stats
-
Nov 4, 2003
Grant Date -
Nov 7, 2002
app pub date -
Mar 29, 2002
filing date -
Mar 29, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Several embodiments of a microinterferometer are disclosed. A first embodiment of a microinterferometer for measuring the absolute distance to an object surface includes a substrate. The microinterferometer also includes a phase-sensitive, reflective diffraction grating formed on the substrate. The diffraction grating is configured to reflect a first portion of an incident light and transmit a second portion of the incident light, such that the second portion of the incident light is diffracted. The microinterferometer further includes a lens formed on the substrate for focusing the second portion of the incident light to a predetermined local distance, and a photo-detector for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating and the second portion of the incident light reflected from the object surface.
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