Gimbaled micro-mirror positionable by thermal actuators
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United States of America Patent
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-
Nov 11, 2003
Grant Date -
N/A
app pub date -
Oct 31, 2000
filing date -
Oct 31, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-mechanical device including a gimbaled micro-mirror position able by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light.
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