Device and method for the treatment of substrates in a fluid container
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United States of America Patent
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-
Nov 18, 2003
Grant Date -
N/A
app pub date -
Dec 3, 1999
filing date -
Feb 17, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A device for the treatment of substrates has a fluid container and two substrate transport devices positionable above the fluid container. Each substrate transport device is a hood for receiving multiple substrates. Each substrate transport device has at least one substrate support device having a first position for locking the substrates and a second position for releasing the substrates. The substrate transport devices are rigidly connected to one another and linearly movable for alternatingly positioning one of the substrate transport devices above the fluid container.
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