Method of forming regular array of microscopic structures on a substrate
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United States of America Patent
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Nov 18, 2003
Grant Date -
Dec 5, 2002
app pub date -
Jun 17, 2002
filing date -
Jan 25, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of forming a substantially regular array of microscopic structures on a surface of a sample (4) is described. The sample comprises a microscopic layer of at least one first material on a substrate of a second material, wherein the microscopic layer is sufficiently thin that stress fields at the interface of the microscopic layer and the substrate cause formation of separated regions of the first material on the substrate. The microscopic layer on the sample (4) is irradiated by means of a particle beam (5) at an acute angle .alpha., to influence the direction of alignment of said separated regions and/or the relative position of adjacent said separated regions.
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