Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system
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United States of America Patent
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Nov 18, 2003
Issued Date -
N/A
app pub date -
Mar 14, 1996
filing date -
Apr 2, 1991
priority date (Note) -
Expired
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Abstract
A semiconductor device producing method and a semiconductor device producing system employs a processing apparatus provided with a dust particle detecting apparatus. The dust particle detecting apparatus measures the condition of adhesion of dust particles adhering to a work at least before or after processing the work, manages the condition of incremental adhesion of dust particles to the work resulting from processing for each lot of works or for each work on the basis of the measured condition of adhesion of dust particles measured before or after processing the work, and determines the time when the processing apparatus is to be cleaned or the cycle of cleaning the processing apparatus on the basis of the managed condition of adhesion of dust particles.
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