Systems and methods of monitoring thin film deposition
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United States of America Patent
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Nov 25, 2003
Issued Date -
N/A
app pub date -
Oct 7, 2002
filing date -
Apr 23, 2001
priority date (Note) -
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Abstract
Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
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