Differential capacitive pressure sensor and fabricating method therefor
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United States of America Patent
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-
Nov 25, 2003
Grant Date -
Dec 26, 2002
app pub date -
Mar 15, 2002
filing date -
Jun 9, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so that the diaphragm displaces upward and downward in response to a pressure stimulus. A first capacitor is provided on the diaphragm and at least a second capacitor is provided on a bulk portion of the substrate so as to be adjacent to the first capacitor. The first and the second capacitor are connected to each other in series, wherein capacitance differs between the first and the second capacitor when the diaphragm moves up and down in response to the pressure stimulus.
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