Control system for ablating high-density array of vias or indentation in surface of object
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United States of America Patent
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Nov 25, 2003
Issued Date -
N/A
app pub date -
Jun 26, 2002
filing date -
Oct 8, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A laser beam delivery system for ablating a desired array of features in an object to be processed. The imaging system comprises a laser, a shaping apparatus for shaping the laser beam into a plurality of separate laser beams, first and second repeat positioners for redirecting the beams, a converging mechanism for converging the laser beams through a clear aperture of a reflective mirror of the first repeat positioner, and a focusing member for focusing the laser beams at a desired one of a plurality of holographic imaging segments. Each one of the holographic imaging segments, comprising the holographic imaging lens, forms a desired formation in a surface of the object to be processed. A number of the components are housed within a rotatable module and a rotational drive is connected to the rotatable module to facilitate rotation thereof relative to the optical axis.
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