
US Patent No: 6,657,196
Number of patents in Portfolio can not be more than 2000
Method and apparatus for environmental monitoring
Stats
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Dec 2, 2003
Issued date -
Oct 20, 2001
filing date -
10/051,527
serial no -
Expired
status
Importance
Abstract
An infrared beam is applied into an infrared transmitting substrate 10 disposed in an environment to be measured; the infrared beam which has undergone multiple internal reflections in the infrared transmitting substrate 10 and exited from the infrared transmitting substrate 10 is detected; the detected infrared beam is spectroscopically analyzed to measure a species and/or a quantity of the substance in the environment present near the infrared transmitting substrate 10; and a species and/or a concentration of the substance in the environment to be measured are measured based on the species and/or the quantity of the substance in the environment present near the infrared transmitting substrate 10. Thus, the substances in the environment, such as organic contaminants, etc., present in the atmosphere can be identified, or their concentrations can be measured, with high sensitivity and realtime.
First Claim
Related Publications
International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 5,386,121 In situ, non-destructive CVD surface monitor | 10 | 1993 | |
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| 6,166,834 Display apparatus and method for forming hologram suitable for the display apparatus | 51 | 1997 | |
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| 6,476,393 Surface state monitoring method and apparatus | 4 | 1999 | |
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| 5,321,264 Method for evaluating surface state of silicon wafer | 8 | 1992 | |
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| 5,436,454 Optical probe for remote attenuated total reflectance measurements | 18 | 1993 | |
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| 6,217,695 Method and apparatus for radiation heating substrates and applying extruded material | 14 | 1998 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 2, 2015 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |