US Patent No: 6,657,196

Number of patents in Portfolio can not be more than 2000

Method and apparatus for environmental monitoring

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ALSO PUBLISHED AS: 20020125433
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Abstract

An infrared beam is applied into an infrared transmitting substrate 10 disposed in an environment to be measured; the infrared beam which has undergone multiple internal reflections in the infrared transmitting substrate 10 and exited from the infrared transmitting substrate 10 is detected; the detected infrared beam is spectroscopically analyzed to measure a species and/or a quantity of the substance in the environment present near the infrared transmitting substrate 10; and a species and/or a concentration of the substance in the environment to be measured are measured based on the species and/or the quantity of the substance in the environment present near the infrared transmitting substrate 10. Thus, the substances in the environment, such as organic contaminants, etc., present in the atmosphere can be identified, or their concentrations can be measured, with high sensitivity and realtime.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ADVANTEST CORPORATIONTOKYO1724

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Endo, Michiaki Abiko, JP 18 83
Maeda, Yasuhiro Tokyo, JP 31 182
Yoshida, Haruo Kanagawa, JP 79 435

Cited Art

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
5,386,121 In situ, non-destructive CVD surface monitor 10 1993
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
6,166,834 Display apparatus and method for forming hologram suitable for the display apparatus 51 1997
 
NIWANO, MICHIO (1)
6,476,393 Surface state monitoring method and apparatus 4 1999
 
SHIN-ETSU HANDOTAI CO., LTD. (1)
5,321,264 Method for evaluating surface state of silicon wafer 8 1992
 
THERMO NICOLET CORPORATION (1)
5,436,454 Optical probe for remote attenuated total reflectance measurements 18 1993
 
WMW SYSTEMS, LLC (1)
6,217,695 Method and apparatus for radiation heating substrates and applying extruded material 14 1998

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
UT-BATTELLE, LLC (4)
7,961,313 Photoacoustic point spectroscopy 3 2008
7,924,423 Reverse photoacoustic standoff spectroscopy 1 2008
8,194,246 Photoacoustic microcantilevers 2 2009
8,080,796 Standoff spectroscopy using a conditioned target 1 2010
 
ADVANTEST CORPORATION (1)
7,265,369 Method and system for detecting chemical substance 0 2002
 
BRUKER DALTONIK GMBH (1)
7,910,881 Mass spectrometry with laser ablation 1 2007
 
CAMFIL AB (1)
7,621,989 Filter structure, filter panel comprising the filter structure and method for manufacturing the filter structure 0 2004
 
LOCKHEED MARTIN CORPORATION (1)
7,504,154 Moisture barrier coatings for infrared salt optics 0 2005
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (1)
8,448,261 Mode synthesizing atomic force microscopy and mode-synthesizing sensing 0 2010

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