Very large angle integrated optical scanner made with an array of piezoelectric monomorphs
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Dec 2, 2003
Grant Date -
N/A
app pub date -
Nov 16, 2000
filing date -
Mar 18, 1999
priority date (Note) -
Expired
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Abstract
A micromachined mirror scanning system having plural benders of morphs and support arms between a mirror surface of silicon and a surrounding frame. Electrical energization of the morphs with a DC voltage under the control of a computer provides a large range of mirror orientations and positions and the devices occupy a small planar package. The devices of the invention are formed from a single wafer of silicon and have low response times and large scan angles.
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