System for processing a workpiece
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United States of America Patent
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-
Dec 9, 2003
Issued Date -
N/A
app pub date -
Aug 2, 2001
filing date -
Mar 13, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to a motor for rotation. The workpiece housing defines a substantially closed processing chamber therein in which one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. A dividing member at the edge of the spinning workpiece separates flow of fluids off of the top and bottom surfaces of the workpiece.
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Cited Art Landscape
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