Electronic device and process for producing the same
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United States of America Patent
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Dec 9, 2003
Grant Date -
N/A
app pub date -
Sep 12, 2000
filing date -
Sep 16, 1999
priority date (Note) -
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Importance
Abstract
Electrically functional electronic device including an organic electroluminescence device is protected with a dense protective film, e.g. a silicon oxynitride film, formed on at least one part of the outer surface of the device at a low temperature by ECR plasma sputtering can prevent permeation of moisture, oxygen etc. into the device from the outside.
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