Method for forming alignment layer by ion beam surface modification
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United States of America Patent
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Dec 16, 2003
Grant Date -
May 30, 2002
app pub date -
Nov 30, 2000
filing date -
Nov 30, 2000
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Abstract
A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.
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