Optical reticle substrate inspection apparatus and beam scanning method of the same
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United States of America Patent
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Dec 16, 2003
Issued Date -
N/A
app pub date -
Feb 4, 2003
filing date -
Nov 30, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output from the laser, an a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.
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