System for processing a workpiece
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United States of America Patent
Stats
-
Dec 23, 2003
Grant Date -
Feb 28, 2002
app pub date -
Aug 2, 2001
filing date -
Mar 13, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to a motor for rotation. The workpiece housing forms a substantially closed processing chamber where one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. Multiple housings may be vertically stacked and rotated about a common rotation axis to simultaneously process multiple workpieces in a small space.
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Cited Art Landscape
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