Substrate processing apparatus and substrate processing method
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United States of America Patent
Stats
-
Dec 30, 2003
Grant Date -
Sep 26, 2002
app pub date -
Mar 18, 2002
filing date -
Mar 22, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A support member of a rotary base member engages with a substrate for preventing the substrate from horizontal movement and rotation with respect to the rotary base member while allowing vertical movement of the substrate, and a proximity suction plate is provided above the rotary base member so that the lower surface thereof is formed on a plane on the rotary base member parallel to the substrate for downwardly and outwardly injecting gas toward the overall upper surface of the substrate and sucking the substrate in a proximity state by Bernoulli effect. It is possible to provide an apparatus capable of reliably preventing mist of a processing solution or the processing solution from reaching the upper surface of the substrate when rotating the substrate and supplying the processing solution to the lower surface for processing the substrate.
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