Linear drive system for use in a plasma processing system
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United States of America Patent
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Dec 30, 2003
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N/A
app pub date -
Nov 5, 2001
filing date -
Dec 30, 1999
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Abstract
A plasma processing system for processing a substrate is disclosed. The system includes a process component capable of effecting a plasma inside a process chamber. The system also includes a gear drive assembly for moving the process component in a linear direction during processing of the substrate.
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