Electrostatic zipper actuator optical beam switching system and method of operation
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United States of America Patent
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-
Dec 30, 2003
Grant Date -
Dec 19, 2002
app pub date -
May 23, 2001
filing date -
May 23, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.
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Cited Art Landscape
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