US Patent No: 6,674,090

Number of patents in Portfolio can not be more than 2000

Structure and method for planar lateral oxidation in active

Stats

ATTORNEY / AGENT: (SPONSORED)
 

Importance

Loading Importance Indicators... loading....

Abstract

An active semiconductor device is made using planar lateral oxidation to define a core region that is surrounded by regions of buried oxidized semiconductor material in. The buried oxidized semiconductor material provides optical waveguiding, and or a defined electrical path.

Loading the Abstract Image... loading....

First Claim

Related Publications

Loading Related Publications... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
XEROX CORPORATIONSTAMFORD, CT17085

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chua, Christopher L San Jose, CA 136 1404
Floyd, Philip D Redwood City, CA 90 2058
Paoli, Thomas L Aptos, CA 91 2190
Sun, Decai Los Altos, CA 63 1789

Cited Art

Patent Info (Count) # Cites Year
 
AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD. (1)
5,896,408 Near planar native-oxide VCSEL devices and arrays using converging oxide ringlets 73 1997
 
JDS UNIPHASE CORPORATION (1)
5,719,891 Conductive element with lateral oxidation barrier 96 1995
 
XEROX CORPORATION (1)
5,978,408 Highly compact vertical cavity surface emitting lasers 80 1997

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (155)
7,123,216 Photonic MEMS and structures 480 1999
7,138,984 Directly laminated touch sensitive screen 89 2001
7,042,643 Interferometric modulation of radiation 155 2002
7,110,158 Photonic MEMS and structures 157 2002
7,012,726 MEMS devices with unreleased thin film components 65 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 128 2003
7,692,844 Interferometric modulation of radiation 10 2004
7,532,194 Driver voltage adjuster 3 2004
7,119,945 Altering temporal response of microelectromechanical elements 119 2004
7,706,050 Integrated modulator illumination 27 2004
7,476,327 Method of manufacture for microelectromechanical devices 29 2004
7,060,895 Modifying the electro-mechanical behavior of devices 38 2004
7,893,919 Display region architectures 2 2005
7,813,026 System and method of reducing color shift in a display 10 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 10 2005
7,142,346 System and method for addressing a MEMS display 26 2005
7,515,147 Staggered column drive circuit systems and methods 9 2005
7,379,227 Method and device for modulating light 10 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 35 2005
7,289,259 Conductive bus structure for interferometric modulator array 55 2005
7,460,246 Method and system for sensing light using interferometric elements 8 2005
7,560,299 Systems and methods of actuating MEMS display elements 7 2005
7,012,732 Method and device for modulating light with a time-varying signal 53 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 6 2005
7,299,681 Method and system for detecting leak in electronic devices 1 2005
7,920,135 Method and system for driving a bi-stable display 2 2005
7,679,627 Controller and driver features for bi-stable display 1 2005
7,586,484 Controller and driver features for bi-stable display 11 2005
7,535,466 System with server based control of client device display features 5 2005
7,532,195 Method and system for reducing power consumption in a display 2 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 37 2005
7,289,256 Electrical characterization of interferometric modulators 10 2005
7,602,375 Method and system for writing data to MEMS display elements 0 2005
7,321,456 Method and device for corner interferometric modulation 32 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 1 2005
7,372,613 Method and device for multistate interferometric light modulation 63 2005
7,889,163 Drive method for MEMS devices 6 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 29 2005
7,843,410 Method and device for electrically programmable display 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 26 2005
7,547,565 Method of manufacturing optical interference color display 12 2005
7,527,995 Method of making prestructure for MEMS systems 20 2005
7,808,703 System and method for implementation of interferometric modulator displays 2 2005
RE42119 Microelectrochemical systems device and method for fabricating same 4 2005
8,008,736 Analog interferometric modulator device 0 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 18 2005
7,471,444 Interferometric modulation of radiation 12 2005
7,388,706 Photonic MEMS and structures 10 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 18 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 7 2005
7,304,784 Reflective display device having viewable display on both sides 32 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 19 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 0 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 1 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 0 2005
7,492,502 Method of fabricating a free-standing microstructure 11 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 23 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 10 2005
7,136,213 Interferometric modulators having charge persistence 14 2005
7,564,612 Photonic MEMS and structures 53 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 142 2005
7,369,294 Ornamental display device 38 2005
7,653,371 Selectable capacitance circuit 10 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 3 2005
7,675,669 Method and system for driving interferometric modulators 2 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 10 2005
7,545,550 Systems and methods of actuating MEMS display elements 1 2005
8,310,441 Method and system for writing data to MEMS display elements 0 2005
7,446,927 MEMS switch with set and latch electrodes 5 2005
7,486,429 Method and device for multistate interferometric light modulation 8 2005
7,236,284 Photonic MEMS and structures 82 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 0 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 1 2005
7,355,779 Method and system for driving MEMS display elements 1 2006
7,916,980 Interconnect structure for MEMS device 0 2006
8,194,056 Method and system for writing data to MEMS display elements 0 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 6 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 19 2006
7,483,197 Photonic MEMS and structures 16 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 11 2006
7,532,377 Movable micro-electromechanical device 28 2006
7,948,457 Systems and methods of actuating MEMS display elements 0 2006
7,903,047 Mode indicator for interferometric modulator displays 2 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 4 2006
8,049,713 Power consumption optimized display update 1 2006
7,920,136 System and method of driving a MEMS display device 0 2006
7,706,044 Optical interference display cell and method of making the same 8 2006
7,880,954 Integrated modulator illumination 14 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 15 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,161,094 Modifying the electro-mechanical behavior of devices 17 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 7 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 4 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 4 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 42 2006
7,777,715 Passive circuits for de-multiplexing display inputs 2 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 10 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 3 2006
7,534,640 Support structure for MEMS device and methods therefor 13 2006
7,830,586 Transparent thin films 10 2006
7,554,711 MEMS devices with stiction bumps 30 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 3 2006
7,928,940 Drive method for MEMS devices 0 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 2 2006
7,388,697 System and method for addressing a MEMS display 5 2006
7,242,512 System and method for addressing a MEMS display 6 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,545,556 Method and apparatus for measuring the force of stiction of a membrane in a MEMS device 1 2006
7,733,552 MEMS cavity-coating layers and methods 3 2007
7,423,287 System and method for measuring residual stress 10 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 1 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,804,636 Electrical characterization of interferometric modulators 2 2007
7,569,488 Methods of making a MEMS device by monitoring a process parameter 21 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 14 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 10 2007
7,869,055 Process control monitors for interferometric modulators 0 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 2 2007
7,556,917 Method for manufacturing an array of interferometric modulators 11 2007
7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts 16 2007
7,623,752 System and method of testing humidity in a sealed MEMS device 4 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
7,894,076 Electro-optical measurement of hysteresis in interferometric modulators 1 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 0 2008
7,580,176 Electrical characterization of interferometric modulators 9 2008
7,688,452 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 1 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 1 2008
8,027,800 Apparatus and method for testing a panel of interferometric modulators 2 2008
7,978,953 Methods for visually inspecting interferometric modulators for defects 2 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
8,368,124 Electromechanical devices having etch barrier layers 0 2009
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 4 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,278,726 Controlling electromechanical behavior of structures within a microelectromechanical systems device 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
 
CANON KABUSHIKI KAISHA (1)
7,499,481 Surface-emitting laser and method for producing the same 9 2007
 
PALO ALTO RESEARCH CENTER INCORPORATED (1)
7,257,141 Phase array oxide-confined VCSELs 2 2003
 
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS (1)
7,027,225 Substrate independent distributed bragg reflector and formation method 0 2003
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 5 2005

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 6, 2015
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00