Method of multivariate spectral analysis

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United States of America Patent

PATENT NO 6675106
SERIAL NO

09873078

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Abstract

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A method of determining the properties of a sample from measured spectral data collected from the sample by performing a multivariate spectral analysis. The method can include: generating a two-dimensional matrix A containing measured spectral data; providing a weighted spectral data matrix D by performing a weighting operation on matrix A; factoring D into the product of two matrices, C and S.sup.T, by performing a constrained alternating least-squares analysis of D=CS.sup.T, where C is a concentration intensity matrix and S is a spectral shapes matrix; unweighting C and S by applying the inverse of the weighting used previously; and determining the properties of the sample by inspecting C and S. This method can be used to analyze X-ray spectral data generated by operating a Scanning Electron Microscope (SEM) with an attached Energy Dispersive Spectrometer (EDS).

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Patent Owner(s)

Patent OwnerAddress
NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLCP O BOX 5800 MS-0161 ALBUQUERQUE NM 87185

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Keenan, Michael R Albuquerque, NM 15 414
Kotula, Paul G Albuquerque, NM 3 273

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