System and methods for fabrication of a thin film pattern
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United States of America Patent
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Jan 13, 2004
Grant Date -
Oct 23, 2003
app pub date -
Apr 30, 2003
filing date -
Mar 31, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a method for fabricating a thin film pattern including forming a pattern made of an organic molecule film on a substrate. The method further includes supplying a solution for forming a thin film onto the organic molecule film pattern, and selectively forming the thin film on the organic molecule film pattern.
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