Method of producing flat panels
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United States of America Patent
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-
Jan 20, 2004
Grant Date -
Apr 3, 2003
app pub date -
Sep 6, 2002
filing date -
Dec 17, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for producing flat panels for TFT or plasma display applications includes forming a sputter source within a sputter coating chamber, the source having at least two electrically mutually isolated stationery bar-shaped target arrangements. A controlled magnet arrangement provided under each target with a time-varying magnetron field.
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