Method for dispensing flowable substances on microelectronic substrates
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United States of America Patent
Stats
-
Jan 20, 2004
Grant Date -
Jan 16, 2003
app pub date -
Jul 11, 2001
filing date -
Jul 11, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for dispensing a flowable substance, such as a flowable photoresist, on a microelectronic substrate. The method can include dispensing a portion of the flowable substance on the microelectronic substrate, receiving an image of at least some of the flowable substance on the microelectronic substrate, and, (with reference to the image), comparing a characteristic of the image with a pre-selected characteristic, or comparing a time required to dispense the portion of the flowable substance with a pre-selected, or both. The method can further include adjusting a characteristic of the dispense process when the image differs from the pre-selected image by at least a predetermined amount, or when the time differs from the pre-selected time by at least a predetermined amount, or both.
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