US Patent No: 6,680,792

Number of patents in Portfolio can not be more than 2000

Interferometric modulation of radiation

5 Status Updates

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ALSO PUBLISHED AS: 20020024711
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

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First Claim

Related Publications

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miles, Mark W San Francisco, CA 191 10142

Cited Art

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (5)
5,835,255 Visible spectrum modulator arrays 460 1994
6,040,937 Interferometric modulation 573 1996
5,986,796 Visible spectrum modulator arrays 446 1996
6,055,090 Interferometric modulation 423 1999
2002/0075,555 Interferometric modulation of radiation 387 2001
 
U.S. PHILIPS CORPORATION (5)
4,403,248 Display device with deformable reflective medium 322 1981
4,519,676 Passive display device 232 1983
4,459,182 Method of manufacturing a display device 232 1983
4,681,403 Display device with micromechanical leaf spring switches 213 1986
4,965,562 Electroscopic display device 126 1988
 
TEXAS INSTRUMENTS INCORPORATED (4)
5,168,406 Color deformable mirror device and method for manufacture 269 1991
5,231,532 Switchable resonant filter for optical radiation 233 1992
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 291 1994
5,808,780 Non-contacting micromechanical optical switch 222 1997
 
LUCENT TECHNOLOGIES INC. (3)
5,636,052 Direct view display based on a micromechanical modulation 290 1994
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 262 1996
5,943,158 Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method 209 1998
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (3)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 333 1989
5,233,459 Electric display device 332 1991
6,243,149 Method of imaging using a liquid crystal display device 172 1999
 
BAKER, JOHN M. (2)
5,552,925 Electro-micro-mechanical shutters on transparent substrates 217 1993
5,784,190 Electro-micro-mechanical shutters on transparent substrates 245 1995
 
CANON KABUSHIKI KAISHA (2)
6,100,872 Display control method and apparatus 172 1997
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1998
 
COLIBRYS SA (2)
5,078,479 Light modulation device with matrix addressing 267 1991
5,579,149 Miniature network of light obturators 214 1994
 
HONEYWELL INC. (2)
4,377,324 Graded index Fabry-Perot optical filter device 225 1980
5,559,358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom 343 1994
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 338 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 242 1989
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 558 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 292 1993
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 324 1994
 
BOIT, INC. (1)
5,636,185 Dynamically changing liquid crystal display timekeeping apparatus 126 1995
 
EASTMAN KODAK COMPANY (1)
5,075,796 Optical article for multicolor imaging 195 1990
 
FSI INTERNATIONAL, INC. (1)
4,900,395 HF gas etching of wafers in an acid processor 169 1989
 
GEMFIRE CORPORATION (1)
5,703,710 Method for manipulating optical energy using poled structure 187 1994
 
GEORGIA TECH RESEARCH CORPORATION (1)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 250 1993
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
5,326,430 Cooling microfan arrangements and process 134 1993
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 275 1999
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
4,389,096 Image display apparatus of liquid crystal valve projection type 270 1981
 
MICRON TECHNOLOGY, INC. (1)
5,358,601 Process for isotropically etching semiconductor devices 151 1993
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 208 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 219 1994
 
NORTHROP CORPORATION (1)
5,153,771 Coherent light modulation and detector 170 1990
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5,793,504 Hybrid angular/spatial holographic multiplexer 142 1996
 
OCEAN POWER TECHNOLOGIES, INC. (1)
4,748,366 Novel uses of piezoelectric materials for creating optical effects 263 1986
 
POPKIN FAMILY ASSETS, L.L.C. (1)
5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 289 1996
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 209 1987
 
QUANTUM DIAGNOSTICS LTD. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 274 1986
 
ROBERT BOSCH GMBH (1)
5,683,591 Process for producing surface micromechanical structures 188 1995
 
ROCKSTAR BIDCO, LP (1)
5,629,790 Micromachined torsional scanner 560 1993
 
ROYAL BANK CAPITAL PARTNERS (1)
5,673,139 Microelectromechanical television scanning device and method for making the same 311 1993
 
SANWA BANK CALIFORNIA (1)
5,293,272 High finesse holographic fabry-perot etalon and method of fabricating 175 1992
 
SOCIETE D'ETUDE DU RADANT (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 176 1982
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
5,726,480 Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same 260 1995
 
THE REGENTS OF THE UNIVERSITY OF COLORADO (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 225 1991
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 165 1979
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (6)
4,445,050 Device for conversion of light power to electric power 178 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 170 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 255 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 132 1992
5,526,327 Spatial displacement time display 133 1994
5,500,635 Products incorporating piezoelectric material 262 1994

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (382)
7,123,216 Photonic MEMS and structures 482 1999
7,138,984 Directly laminated touch sensitive screen 89 2001
7,042,643 Interferometric modulation of radiation 155 2002
7,110,158 Photonic MEMS and structures 158 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 20 2002
7,297,471 Method for manufacturing an array of interferometric modulators 17 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 93 2003
7,460,291 Separable modulator 42 2003
7,012,726 MEMS devices with unreleased thin film components 65 2003
7,198,973 Method for fabricating an interference display unit 89 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 128 2003
7,692,844 Interferometric modulation of radiation 10 2004
7,532,194 Driver voltage adjuster 3 2004
7,119,945 Altering temporal response of microelectromechanical elements 120 2004
7,706,050 Integrated modulator illumination 27 2004
7,193,768 Interference display cell 22 2004
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 25 2004
7,476,327 Method of manufacture for microelectromechanical devices 29 2004
7,060,895 Modifying the electro-mechanical behavior of devices 38 2004
7,280,265 Interferometric modulation of radiation 40 2004
7,164,520 Packaging for an interferometric modulator 30 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 45 2004
7,855,824 Method and system for color optimization in a display 15 2005
7,893,919 Display region architectures 2 2005
7,813,026 System and method of reducing color shift in a display 10 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 10 2005
7,424,198 Method and device for packaging a substrate 2 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 22 2005
7,626,751 Display device having an array of spatial light modulators with integrated color filters 0 2005
7,349,141 Method and post structures for interferometric modulation 19 2005
7,142,346 System and method for addressing a MEMS display 26 2005
7,515,147 Staggered column drive circuit systems and methods 9 2005
7,379,227 Method and device for modulating light 10 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 35 2005
7,289,259 Conductive bus structure for interferometric modulator array 55 2005
7,460,246 Method and system for sensing light using interferometric elements 8 2005
7,560,299 Systems and methods of actuating MEMS display elements 7 2005
7,012,732 Method and device for modulating light with a time-varying signal 53 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 6 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 2 2005
7,928,928 Apparatus and method for reducing perceived color shift 4 2005
7,259,449 Method and system for sealing a substrate 12 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 3 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 5 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 12 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 7 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 7 2005
7,299,681 Method and system for detecting leak in electronic devices 1 2005
7,920,135 Method and system for driving a bi-stable display 2 2005
7,679,627 Controller and driver features for bi-stable display 1 2005
7,586,484 Controller and driver features for bi-stable display 12 2005
7,532,195 Method and system for reducing power consumption in a display 2 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 37 2005
7,289,256 Electrical characterization of interferometric modulators 10 2005
7,602,375 Method and system for writing data to MEMS display elements 0 2005
7,916,103 System and method for display device with end-of-life phenomena 1 2005
7,321,456 Method and device for corner interferometric modulation 32 2005
7,573,547 System and method for protecting micro-structure of display array using spacers in gap within display device 6 2005
7,551,246 System and method for display device with integrated desiccant 5 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 1 2005
7,372,613 Method and device for multistate interferometric light modulation 63 2005
8,362,987 Method and device for manipulating color in a display 0 2005
7,889,163 Drive method for MEMS devices 6 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 29 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 3 2005
7,843,410 Method and device for electrically programmable display 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 26 2005
7,547,565 Method of manufacturing optical interference color display 12 2005
7,527,995 Method of making prestructure for MEMS systems 20 2005
7,446,926 System and method of providing a regenerating protective coating in a MEMS device 19 2005
7,808,703 System and method for implementation of interferometric modulator displays 2 2005
7,349,136 Method and device for a display having transparent components integrated therein 7 2005
RE42119 Microelectrochemical systems device and method for fabricating same 4 2005
8,008,736 Analog interferometric modulator device 0 2005
7,710,629 System and method for display device with reinforcing substance 3 2005
7,460,292 Interferometric modulator with internal polarization and drive method 19 2005
8,124,434 Method and system for packaging a display 0 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 18 2005
7,471,444 Interferometric modulation of radiation 12 2005
7,388,706 Photonic MEMS and structures 10 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 18 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 53 2005
8,004,504 Reduced capacitance display element 3 2005
7,561,323 Optical films for directing light towards active areas of displays 28 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 7 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 12 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 7 2005
8,031,133 Method and device for manipulating color in a display 3 2005
7,304,784 Reflective display device having viewable display on both sides 33 2005
7,750,886 Methods and devices for lighting displays 39 2005
7,525,730 Method and device for generating white in an interferometric modulator display 15 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 78 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 19 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 0 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 1 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 0 2005
7,492,502 Method of fabricating a free-standing microstructure 11 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 23 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 14 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 10 2005
7,136,213 Interferometric modulators having charge persistence 14 2005
8,102,407 Method and device for manipulating color in a display 8 2005
7,911,428 Method and device for manipulating color in a display 14 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 17 2005
7,728,800 Method and device for manipulating color in a display 0 2005
7,564,612 Photonic MEMS and structures 53 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 144 2005
7,369,294 Ornamental display device 38 2005
7,684,104 MEMS using filler material and method 7 2005
7,898,521 Device and method for wavelength filtering 17 2005
7,782,293 Device and method for wavelength filtering 0 2005
7,653,371 Selectable capacitance circuit 10 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 3 2005
7,675,669 Method and system for driving interferometric modulators 2 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 10 2005
7,545,550 Systems and methods of actuating MEMS display elements 1 2005
8,310,441 Method and system for writing data to MEMS display elements 0 2005
7,446,927 MEMS switch with set and latch electrodes 5 2005
7,486,429 Method and device for multistate interferometric light modulation 8 2005
7,236,284 Photonic MEMS and structures 82 2005
7,630,114 Diffusion barrier layer for MEMS devices 1 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
7,561,334 Method and apparatus for reducing back-glass deflection in an interferometric modulator display device 1 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 0 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 1 2005
7,355,779 Method and system for driving MEMS display elements 1 2006
7,916,980 Interconnect structure for MEMS device 0 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 4 2006
8,194,056 Method and system for writing data to MEMS display elements 0 2006
7,603,001 Method and apparatus for providing back-lighting in an interferometric modulator display device 36 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 6 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 19 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 40 2006
7,483,197 Photonic MEMS and structures 16 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 11 2006
7,532,377 Movable micro-electromechanical device 28 2006
7,643,203 Interferometric optical display system with broadband characteristics 17 2006
7,948,457 Systems and methods of actuating MEMS display elements 0 2006
7,903,047 Mode indicator for interferometric modulator displays 2 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 0 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 42 2006
8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 1 2006
7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
8,049,713 Power consumption optimized display update 1 2006
7,920,136 System and method of driving a MEMS display device 0 2006
7,706,044 Optical interference display cell and method of making the same 8 2006
7,880,954 Integrated modulator illumination 14 2006
7,369,292 Electrode and interconnect materials for MEMS devices 13 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 15 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,907,319 Method and device for modulating light with optical compensation 19 2006
7,161,094 Modifying the electro-mechanical behavior of devices 17 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 7 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 60 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 4 2006
7,766,498 Linear solid state illuminator 13 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 4 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 42 2006
7,777,715 Passive circuits for de-multiplexing display inputs 2 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 10 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 3 2006
7,936,031 MEMS devices having support structures 2 2006
7,679,812 Support structure for MEMS device and methods therefor 10 2006
7,566,940 Electromechanical devices having overlying support structures 7 2006
7,534,640 Support structure for MEMS device and methods therefor 13 2006
7,830,586 Transparent thin films 10 2006
7,554,711 MEMS devices with stiction bumps 30 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 3 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 24 2006
7,747,109 MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same 0 2006
7,704,773 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 2 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 2 2006
7,928,940 Drive method for MEMS devices 0 2006
8,107,155 System and method for reducing visual artifacts in displays 0 2006
7,855,827 Internal optical isolation structure for integrated front or back lighting 11 2006
7,684,107 Internal optical isolation structure for integrated front or back lighting 0 2006
7,898,722 Microelectromechanical device with restoring electrode 26 2006
7,629,197 Spatial light modulator 27 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 4 2006
7,385,748 Visible spectrum modulator arrays 26 2006
7,388,697 System and method for addressing a MEMS display 5 2006
7,242,512 System and method for addressing a MEMS display 6 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 40 2006
7,816,164 MEMS processing 2 2006
7,706,042 MEMS device and interconnects for same 2 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 23 2006
7,556,981 Switches for shorting during MEMS etch release 1 2006
7,489,428 Area array modulation and lead reduction in interferometric modulators 14 2007
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 0 2007
7,957,589 Arbitrary power function using logarithm lookup table 0 2007
7,884,989 White interferometric modulators and methods for forming the same 2 2007
7,872,792 Method and device for modulating light with multiple electrodes 4 2007
7,777,954 Systems and methods of providing a light guiding layer 16 2007
7,518,775 Method and system for packaging a MEMS device 6 2007
7,742,220 Microelectromechanical device and method utilizing conducting layers separated by stops 7 2007
7,746,537 MEMS devices and processes for packaging such devices 9 2007
7,715,080 Packaging a MEMS device using a frame 1 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 1 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,733,439 Dual film light guide for illuminating displays 21 2007
7,715,085 Electromechanical system having a dielectric movable membrane and a mirror 4 2007
7,643,202 Microelectromechanical system having a dielectric movable membrane and a mirror 5 2007
8,040,587 Desiccant in a MEMS device 1 2007
8,111,262 Interferometric modulator displays with reduced color sensitivity 0 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 0 2007
7,643,199 High aperture-ratio top-reflective AM-iMod displays 6 2007
7,826,127 MEMS device having a recessed cavity and methods therefor 0 2007
7,782,517 Infrared and dual mode displays 4 2007
7,944,599 Electromechanical device with optical function separated from mechanical and electrical function 1 2007
7,630,121 Electromechanical device with optical function separated from mechanical and electrical function 9 2007
7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function 14 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
8,115,987 Modulating the intensity of light from an interferometric reflector 0 2007
7,642,127 Method and system for sealing a substrate 2 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 14 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 10 2007
7,601,571 Methods of manufacturing interferometric modulators with thin film transistors 1 2007
7,852,545 Method and device for modulating light 8 2007
7,808,694 Method and device for modulating light 8 2007
7,629,678 Method and system for sealing a substrate 1 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 2 2007
7,492,503 System and method for multi-level brightness in interferometric modulation 19 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 2 2007
8,435,838 Optimization of desiccant usage in a MEMS package 0 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 2 2007
7,982,700 Conductive bus structure for interferometric modulator array 0 2007
7,542,198 Device having a conductive light absorbing mask and method for fabricating same 19 2007
7,999,993 Reflective display device having viewable display on both sides 0 2007
7,729,036 Capacitive MEMS device with programmable offset voltage control 1 2007
7,556,917 Method for manufacturing an array of interferometric modulators 11 2007
7,773,286 Periodic dimple array 2 2007
8,068,710 Decoupled holographic film and diffuser 0 2007
7,949,213 Light illumination of displays with front light guide and coupling elements 3 2007
7,715,079 MEMS devices requiring no mechanical support 3 2007
7,576,901 Method and device for selective adjustment of hysteresis window 1 2007
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 1 2007
7,929,196 System and method of implementation of interferometric modulators for display mirrors 5 2008
7,847,999 Interferometric modulator display devices 1 2008
8,111,445 Spatial light modulator with integrated optical compensation structure 1 2008
7,663,794 Methods and devices for inhibiting tilting of a movable element in a MEMS device 8 2008
7,515,327 Method and device for corner interferometric modulation 10 2008
7,816,710 Packaging for an interferometric modulator with a curved back plate 0 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 4 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 2 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 1 2008
8,164,821 Microelectromechanical device with thermal expansion balancing layer or stiffening layer 0 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 0 2008
7,719,747 Method and post structures for interferometric modulation 13 2008
7,643,305 System and method of preventing damage to metal traces of flexible printed circuits 0 2008
7,859,739 Interferometric modulator array with integrated MEMS electrical switches 0 2008
7,977,931 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2008
7,612,933 Microelectromechanical device with spacing layer 16 2008
8,077,326 Human-readable, bi-state environmental sensors based on micro-mechanical membranes 0 2008
7,852,491 Human-readable, bi-state environmental sensors based on micro-mechanical membranes 3 2008
7,898,723 Microelectromechanical systems display element with photovoltaic structure 5 2008
7,969,638 Device having thin black mask and method of fabricating the same 0 2008
7,545,554 MEMS display 4 2008
7,948,672 System and methods for tiling display panels 0 2008
7,839,557 Method and device for multistate interferometric light modulation 5 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 1 2008
8,023,167 Backlight displays 0 2008
7,768,690 Backlight displays 1 2008
7,746,539 Method for packing a display device and the device obtained thereof 1 2008
7,782,522 Encapsulation methods for interferometric modulator and MEMS devices 0 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
7,855,826 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices 6 2008
8,045,835 Method and device for packaging a substrate 1 2008
7,911,677 MEMS switch with set and latch electrodes 0 2008
8,130,440 Display with integrated photovoltaic device 0 2008
8,054,527 Adjustably transmissive MEMS-based devices 0 2008
7,704,772 Method of manufacture for microelectromechanical devices 11 2008
7,859,740 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control 0 2008
7,839,559 Controller and driver features for bi-stable display 0 2008
7,978,396 Optical interference display panel 1 2008
7,787,173 System and method for multi-level brightness in interferometric modulation 6 2008
7,808,695 Method and apparatus for low range bit depth enhancement for MEMS display architectures 0 2008
7,791,787 Moveable micro-electromechanical device 0 2009
7,646,529 Method and device for multistate interferometric light modulation 1 2009
7,782,525 Area array modulation and lead reduction in interferometric modulators 2 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 11 2009
7,944,604 Interferometric modulator in transmission mode 1 2009
8,204,703 Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display 0 2009
8,040,589 Devices and methods for enhancing brightness of displays using angle conversion layers 0 2009
8,410,690 Display device with desiccant 0 2009
7,852,542 Current mode display driver circuit realization feature 0 2009
8,172,417 Shaped frontlight reflector for use with display 0 2009
8,270,056 Display device with openings between sub-pixels and method of making same 0 2009
8,405,649 Low voltage driver scheme for interferometric modulators 0 2009
8,248,358 Altering frame rates in a MEMS display by selective line skipping 0 2009
8,061,882 Illumination device with built-in light coupler 0 2009
8,368,981 Display device with diffractive optics 0 2009
8,115,983 Method and system for packaging a MEMS device 0 2009
8,049,951 Light with bi-directional propagation 0 2009
7,889,415 Device having a conductive light absorbing mask and method for fabricating same 4 2009
8,098,431 Method and device for generating white in an interferometric modulator display 0 2009
7,864,402 MEMS display 2 2009
8,102,590 Method of manufacturing MEMS devices providing air gap control 0 2009
8,081,370 Support structures for electromechanical systems and methods of fabricating the same 0 2009
7,952,787 Method of manufacturing MEMS devices providing air gap control 0 2009
8,004,736 Optical interference display panel and manufacturing method thereof 0 2009
8,243,014 Method and system for reducing power consumption in a display 0 2009
8,085,461 Systems and methods of actuating MEMS display elements 0 2009
8,207,920 System and method of sensing actuation and release voltages of an interferometric modulator 1 2009
7,986,451 Optical films for directing light towards active areas of displays 0 2009
7,990,604 Analog interferometric modulator 3 2009
7,889,417 Electromechanical system having a dielectric movable membrane 2 2009
7,952,788 Method and device for selective adjustment of hysteresis window 0 2009
8,405,899 Photonic MEMS and structures 0 2009
7,875,485 Methods of fabricating MEMS devices having overlying support structures 2 2009
8,358,266 Light turning device with prismatic light turning features 0 2009
8,270,062 Display device with at least one movable stop element 0 2009
8,068,269 Microelectromechanical device with spacing layer 0 2009
8,379,392 Light-based sealing and device packaging 0 2009
7,944,602 Systems and methods using interferometric optical modulators and diffusers 7 2009
8,085,458 Diffusion barrier layer for MEMS devices 0 2009
8,081,372 Method and system for driving interferometric modulators 0 2009
7,935,555 Method and system for sealing a substrate 0 2009
7,920,319 Electromechanical device with optical function separated from mechanical and electrical function 0 2009
8,045,256 Method and device for compensating for color shift as a function of angle of view 0 2009
7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator 1 2009
7,924,494 Apparatus and method for reducing slippage between structures in an interferometric modulator 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
7,995,265 Interferometric modulators having charge persistence 0 2009
8,144,385 Method and device for multistate interferometric light modulation 0 2010
8,098,416 Analog interferometric modulator device with electrostatic actuation and release 0 2010
7,933,476 Method and device for providing electronic circuitry on a backplate 3 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,852,544 Separable modulator 31 2010
8,169,688 System and method of reducing color shift in a display 0 2010
7,990,601 System and method for display device with reinforcing substance 1 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
7,978,395 Capacitive MEMS device with programmable offset voltage control 0 2010
8,330,770 System and method for improving the quality of halftone video using an adaptive threshold 0 2010
8,305,394 System and method for improving the quality of halftone video using a fixed threshold 0 2010
7,929,197 System and method for a MEMS device 0 2010
8,054,532 Method and device for providing illumination to interferometric modulators 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,344,997 Method and system for writing data to electromechanical display elements 0 2010
8,040,338 Method of making passive circuits for de-multiplexing display inputs 1 2010
7,898,725 Apparatuses with enhanced low range bit depth 2 2010
8,081,373 Devices and methods for enhancing color shift of interferometric modulators 0 2010
8,264,763 Controller and driver features for bi-stable display 0 2010
8,213,075 Method and device for multistate interferometric light modulation 0 2010
8,223,424 Interferometric modulator array with integrated MEMS electrical switches 0 2010
8,009,347 MEMS display 0 2010
8,035,883 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,120,125 MEMS devices having overlying support structures 1 2011
8,098,417 Electromechanical system having a dielectric movable membrane 0 2011
8,368,997 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,289,613 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,174,752 Interferometric modulator in transmission mode 0 2011
8,090,229 Method and device for providing electronic circuitry on a backplate 1 2011
8,344,470 Electromechanical devices having support structures 0 2011
8,390,547 Conductive bus structure for interferometric modulator array 0 2011
8,299,774 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2011
8,243,360 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,218,919 Method and device for providing electronic circuitry on a backplate 0 2012
8,355,883 Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display 0 2012
8,437,071 Interferometric modulator array with integrated MEMS electrical switches 0 2012
 
PIXTRONIX, INC. (28)
7,417,782 Methods and apparatus for spatial light modulation 15 2005
7,304,785 Display methods and apparatus 21 2005
7,304,786 Methods and apparatus for bi-stable actuation of displays 23 2005
7,271,945 Methods and apparatus for actuating displays 20 2005
8,159,428 Display methods and apparatus 0 2006
7,755,582 Display methods and apparatus 1 2006
7,742,016 Display methods and apparatus 1 2006
7,616,368 Light concentrating reflective display methods and apparatus 1 2006
7,405,852 Display apparatus and methods for manufacture thereof 25 2006
7,619,806 Methods and apparatus for spatial light modulation 4 2006
8,310,442 Circuits for controlling display apparatus 0 2006
7,502,159 Methods and apparatus for actuating displays 10 2007
7,365,897 Methods and apparatus for spatial light modulation 15 2007
7,675,665 Methods and apparatus for actuating displays 4 2007
7,839,356 Display methods and apparatus 3 2007
7,636,189 Display methods and apparatus 2 2007
7,551,344 Methods for manufacturing displays 3 2007
7,927,654 Methods and apparatus for spatial light modulation 1 2007
7,852,546 Spacers for maintaining display apparatus alignment 4 2007
7,746,529 MEMS display apparatus 4 2007
7,742,215 Methods and apparatus for spatial light modulation 0 2007
7,460,290 Methods and apparatus for spatial light modulation 9 2008
7,729,037 Methods and apparatus for spatial light modulation 0 2008
7,898,714 Methods and apparatus for actuating displays 0 2008
7,920,317 Display with controlled formation of bubbles 1 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
7,999,994 Display apparatus and methods for manufacture thereof 0 2009
8,169,679 MEMS anchors 0 2009
 
DONNELLY CORPORATION (9)
7,526,103 Imaging system for vehicle 98 2005
7,423,522 Tire pressure alert system 16 2005
7,616,781 Driver assistance system for vehicle 13 2009
7,792,329 Imaging system for vehicle 3 2009
7,873,187 Driver assistance system for vehicle 4 2010
7,949,152 Driver assistance system for vehicle 2 2010
8,189,871 Vision system for vehicle 1 2011
8,090,153 Imaging system for vehicle 1 2011
8,325,986 Imaging system for vehicle 0 2011
 
BOSE CORPORATION (6)
7,515,336 Selective reflecting 23 2004
7,520,624 Light enhancing 1 2004
7,517,091 Color gamut improvement in presence of ambient light 0 2005
7,535,636 Selective reflecting 1 2006
8,081,368 Selective absorbing 0 2007
7,710,645 Selective reflecting for laser projector 0 2007
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (6)
7,072,093 Optical interference pixel display with charge control 96 2003
7,733,553 Light modulator with tunable optical state 2 2005
7,447,891 Light modulator with concentric control-electrode structure 2 2005
7,218,438 Optical electronic device with partial reflector layer 11 2005
7,221,497 Optical interference pixel display 2 2005
7,741,751 MEMS device having distance stops 1 2006
 
MAGNA ELECTRONICS INC. (5)
8,376,595 Automatic headlamp control 0 2010
8,070,332 Automatic lighting system with adaptive function 1 2011
8,217,830 Forward facing sensing system for a vehicle 2 2011
8,142,059 Automatic lighting system 0 2011
8,294,608 Forward facing sensing system for vehicle 0 2012
 
SONY CORPORATION (4)
6,961,175 Screen, its manufacturing method and image display system 7 2003
7,242,523 Screen, its manufacturing method and image display system 0 2005
7,035,008 Screen, its manufacturing method and image display system 2 2005
7,345,818 Screen, its manufacturing method and image display system 1 2005
 
QUALCOMM INCORPORATED (3)
7,532,385 Optical interference display panel and manufacturing method thereof 10 2004
7,470,373 Optical interference display panel 7 2006
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 5 2007
 
AU OPTRONICS CORP. (1)
7,898,721 Method and device for adjusting driving voltage of microelectromechanical optical device 0 2005
 
AVANEX CORPORATION (1)
7,046,374 Interferometers for optical communications utilizing photo-sensitive materials 14 2003
 
E-VISION, LLC (1)
7,619,809 Mirror assemblies incorporating variable index of refraction materials 0 2006
 
INTELLIMATS, LLC (1)
7,092,144 Mirror assemblies incorporating variable index of refraction materials 3 2005
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
6,865,641 Method and apparatus for non-volatile display of information for an electronic device 0 2002
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 27 2004
 
PITRONIX, INC. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 0 2011
 
QUALCOMM MEMS TECHNOLOGIES CO., LTD. (1)
7,172,915 Optical-interference type display panel and method for making the same 69 2004
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 5 2005
 
VOLKSWAGEN AG (1)
7,702,434 Indicating apparatus for a motor vehicle 0 2004
 
XEROX CORPORATION (1)
7,333,208 Full width array mechanically tunable spectrophotometer 7 2004
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (3)
8,446,470 Combined RGB and IR imaging sensor 0 2008
8,446,674 Method and structure capable of changing color saturation 0 2010
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 0 2012

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