System and method of operation of a digital mass flow controller
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United States of America Patent
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Jan 27, 2004
Grant Date -
Oct 3, 2002
app pub date -
Dec 6, 2001
filing date -
Jul 9, 1999
priority date (Note) -
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Abstract
The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve.
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