Silicon integrated accelerometer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jan 27, 2004
Grant Date -
N/A
app pub date -
May 10, 2000
filing date -
Nov 11, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In an accelerometer, the stress is detected through electric amplification with the use of detecting elements 411-434 having an amplification function arranged on beams 3 and, with the use of a differential amplifier circuits 510 formed on the support base 1, an acceleration component in a detection axis direction to which the stress is applied is outputted as the differential mode and acceleration components in the other axis directions are outputted as the common mode, so that each axis sensitivity ratio between the detection axis sensitivity and the other axis sensitivities is enhanced largely.
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