Flextensional transducer and method of forming a flextensional transducer
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United States of America Patent
Stats
-
Feb 3, 2004
Grant Date -
Jul 31, 2003
app pub date -
Jan 30, 2002
filing date -
Oct 31, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A flextensional transducer includes a substrate having an etch stop layer interposed between a first layer and a second layer, a flexible membrane supported by the second layer of the substrate and having an orifice defined therein, and an actuator provided on the flexible membrane and adapted to deflect the flexible membrane. The substrate has an opening formed through the first layer and a hole formed through the etch stop layer and the second layer such that the hole through the etch stop layer and the second layer of the substrate communicates with the opening through the first layer of the substrate and the orifice in the flexible membrane.
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