Polishing pad comprising particles with a solid core and polymeric shell
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United States of America Patent
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Feb 3, 2004
Grant Date -
May 29, 2003
app pub date -
Nov 27, 2001
filing date -
Nov 27, 2001
priority date (Note) -
Expired
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Abstract
The invention provides a polishing pad comprising composite particles that comprise a solid core encapsulated by a polymeric shell material, wherein the solid core comprises a material that differs from the polymeric shell material, as well as a method of polishing a substrate with such a polishing pad.
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