Importance

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Abstract

A method of fabricating a large contactor (62) is provided wherein one or more contactor units (78) are mounted on a support substrate (74) such that contact elements (80) attached to the contactor units are suitably aligned. In this manner, a large area contactor can be prepared using a plurality of smaller contactor units. Preferably the contact elements on the plurality of contactor units are coplanar across the contactor units. This is particularly advantageous for making a large contactor for probing semiconductor devices on a wafer. This also can be useful for making a contactor capable of contacting devices across an entire semiconductor wafer. In one embodiment, the contactor units self-align during reflow of a joining material such as solder balls (134) or other reflowable material interconnecting the contactor units and the support substrate. In alternative embodiments, alignment facilitation devices such as keys (154) and indentations (156) are utilized to assist the alignment of the contactor units.

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First Claim