Method of removing an amorphous oxide from a monocrystalline surface

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United States of America Patent

PATENT NO 6693033
SERIAL NO

09983854

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Abstract

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A method of removing an amorphous oxide from a surface of a monocrystalline substrate is provided. The method includes depositing a passivation material overlying the amorphous oxide. The monocrystalline substrate is then heated so that the amorphous oxide layer decomposes into at least one volatile species that is liberated from the surface.

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Patent Owner(s)

Patent OwnerAddress
SHENZHEN XINGUODU TECHNOLOGY CO LTD17TH FLOOR JINSONG MANSION TERRA INDUSTRIAL & TRADE PARK FUTIAN SHENZHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Craigo, James Bradley Tempe, AZ 1 9
Demkov, Alexander A Phoenix, AZ 21 100
Droopad, Ravindranath Chandler, AZ 76 2248
Edwards, Jr John L Phoenix, AZ 3 14
Hu, Xiaoming Chandler, AZ 25 100
Jordan, Dirk C Gilbert, AZ 8 58
Wei, Yi Chandler, AZ 143 2732
Yu, Zhiyi Gilbert, AZ 47 1586

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