Packaging of integrated circuits and vertical integration

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United States of America Patent

PATENT NO 6693361
SERIAL NO

09716092

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A first level packaging wafer is made of a semiconductor or insulating material. The bumps on the wafer are made using vertical integration technology, without solder or electroplating. More particularly, vias are etched part way into a first surface of the substrate. Metal is deposited into the vias. Then the substrate is blanket-etched from the back side until the metal is exposed and protrudes from the vias to form suitable bumps. Dicing methods and vertical integration methods are also provided. Solder or electroplating are used in some embodiments.

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Patent Owner(s)

Patent OwnerAddress
INVENSAS CORPORATION2702 ORCHARD PARKWAY SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Savastiouk, Sergey San Jose, CA 36 2666
Siniaguine, Oleg San Jose, CA 58 4211

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