MEMS structure with surface potential control
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United States of America Patent
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Feb 17, 2004
Grant Date -
N/A
app pub date -
Jul 30, 2001
filing date -
Jul 30, 2001
priority date (Note) -
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Abstract
In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.
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