System for processing a workpiece
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 24, 2004
Grant Date -
Dec 6, 2001
app pub date -
Aug 2, 2001
filing date -
Mar 13, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to a motor for rotation. The workpiece housing forms a processing chamber where one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. An array of workpiece housings are contained within an enclosure. A robot moves workpieces into and out of the workpiece housings.
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Cited Art Landscape
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