System and method for detecting surface roughness
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United States of America Patent
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Mar 2, 2004
Grant Date -
N/A
app pub date -
May 10, 2002
filing date -
May 10, 2002
priority date (Note) -
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Abstract
A method for characterizing a surface are disclosed. The system includes a light source optic which direct a beam of light toward the surface. Scattered light and a spectacular beam are reflected from the surface. A collector collects the scattered light and directs the scattered light to a detector. The detector measures the intensity of the scattered light. A shutter is advanced into position to intersect the scattered light and to block a segment not having substantially any anisotropic light scatter. The shutter further passes another segment having substantially all of the anisotropic light scatter. The detector measures the intensity of the passed segment. A roughness ratio indicative of the anisotropic roughness to the isotropic roughness is produced by evaluating the total intensity of the scattered light and the intensity of the passed segment.
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