Process for producing inkjet printhead
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United States of America Patent
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Mar 9, 2004
Grant Date -
Jul 11, 2002
app pub date -
Dec 27, 2001
filing date -
Jan 8, 2001
priority date (Note) -
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Abstract
An ink cartridge having a piezoelectric jet module has an ink storage module having a hollow ink storage region, a piezoelectric jet module having a plurality of ink chambers and a connection circuit, and an ink channel connected to the ink storage module and to the piezoelectric jet module. The piezoelectric inkjet printhead has a bottom film and chamber walls which are obtained by applying a photosensitive polymer on a substrate on which a piezoelectric layer has been formed and carrying out photolithography.
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