Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
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United States of America Patent
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Mar 9, 2004
Grant Date -
Oct 3, 2002
app pub date -
Apr 3, 2001
filing date -
Apr 3, 2001
priority date (Note) -
In Force
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Abstract
A mirror, or an array of mirrors, for use in a micro-electro-mechanical system (MEMS) optical device. The mirror includes a mirror substrate having a loss-reducing layer located over a first or second side thereof, and a light reflective optical layer located over the loss-reducing layer. The inventive mirror reduces undesirable Fabry-Perot interferrometric optical loss through minimizing the extent of multiple reflections within the MEMS mirror substrate.
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