Port door removal and wafer handling robotic system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 16, 2004
Grant Date -
N/A
app pub date -
Dec 24, 1997
filing date -
Dec 24, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient location within the I/O minienvironment. After wafer processing has been completed and the wafers have been transferred back through the I/O port to the SMEF pod, the system may retrieve the port and pod doors, and return the port door to their sealing positions within the I/O port and cassette, respectively. In a preferred embodiment, the system for gripping and transporting the port and pod doors may be located on the back end of the end effector of the wafer handling robot within the I/O minienvironment. The back end of the end effector is the end of the end effector opposite that used to transport the wafers and/or cassette.
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