Developing treatment method and developing treatment unit
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 16, 2004
Grant Date -
Dec 13, 2001
app pub date -
May 31, 2001
filing date -
Jun 13, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention relates to a method of supplying a developing solution to a surface of a substrate to perform developing treatment for the substrate, comprising a first step of supplying the developing solution to the surface of the substrate while a developing solution supply nozzle is moving relative to the substrate and a second step of developing the substrate for a first predetermined period of time, and the second step has the step of stirring the developing solution on the surface of the substrate after a second predetermined period of time from the completion of the first step. Because of stirring, the concentration of the developing solution on the substrate is made uniform, resulting in a rise in the uniformity of developing treatment.
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