Simulated laser spot enlargement
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United States of America Patent
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Mar 16, 2004
Issued Date -
N/A
app pub date -
Jan 8, 2003
filing date -
Jan 11, 2002
priority date (Note) -
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Abstract
An fast steering mirror (30), such as a PMN actuated mirror, is positioned in a beam path (18) of a stage-based positioning system (40) to continuously move a laser beam (46) in a high speed prescribed pattern about a nominal target position (60) to spatially separate focused laser spots (48) generated at a high laser repetition rate and thereby create geometric features having dimensions greater than those of the focused laser spot (48). A series of laser spots (48) at a given repetition rate appear as a series of larger diameter laser spots at a lower pulse rate without beam quality problems associated with working out of focus.
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