System and process for actuation voltage discharge to prevent stiction attachment in MEMS device
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United States of America Patent
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Mar 16, 2004
Grant Date -
Nov 14, 2002
app pub date -
May 8, 2001
filing date -
May 8, 2001
priority date (Note) -
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Abstract
An electrostatically operated microelectromechanical system comprises a movable and a stationary structure, with a discharge system that is activated upon pull-in of the movable structure to discharge the voltage across an electrostatic cavity to thereby prevent stiction adhesion of the movable structure to the stationary structure. Specifically, a membrane release structure comprises a mirror optical element. The membrane is separated from a stationary support by an electrostatic cavity. The discharge switch comprises a membrane conductor pad on the membrane and a support conductor pad on the support that conducts a current upon activation of the discharge switch to discharge the electrostatic voltage. Preferably, these pads are metal.
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