Importance

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Abstract

Where there are wirings with different film thicknesses or a sheet resistance in a non-scraped state of a wiring layer cannot be obtained as a result of the CPM technique, a wiring resistance according to a film thickness when an LSI is manufactured is acquired by automatic processing to reduce its difference from a real resistance, and accurate voltage drop analysis is carried out to reduce malfunction in a real chip. In a semiconductor circuit device with a plurality of kinds of film thicknesses in the same wiring layer, with a variation occurring in the wiring film thickness when wirings are formed on a silicon wafer, or a warp occurring in an upper layer because the stacking of lower layers is not uniform in the manufacturing process of the wiring, an error of the wiring resistance due to the difference in the film thickness or warp of the wiring is corrected to produce a virtual layout data.

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First Claim