Importance

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Abstract

A system is disclosed for allowing quick and easy installation, maintenance and removal of components within a piece of equipment which may be attached to a front end of processing tool or stand alone unit in a semiconductor processing fab. In a first embodiment, the system includes a translation assembly and a pair of tracks fixedly mounted in frame of the equipment. The translation assembly in this embodiment includes a trolley having four wheels which ride on a portion of each of the tracks. When a component is to be assembled into the piece of equipment, the component is first bolted to the trolley. The trolley and attached component may then be inserted into the frame. The wheels riding on the tracks allow the robot to be quickly and easily moved to its proper position within the equipment. Once properly located, jackscrews threaded through the trolley are rotated to raise the trolley wheels off of the tracks, and to level the trolley and component. The trolley is then bolted down to the track and frame to securely fix the position of the component in the equipment.

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First Claim