Laser processing apparatus and method
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United States of America Patent
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Mar 23, 2004
Issued Date -
N/A
app pub date -
Apr 18, 2003
filing date -
Jun 9, 2000
priority date (Note) -
Expired
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Abstract
A controller outputs a first event signal having a periodical waveform and a second event signal having a periodical waveform synchronizing with the first event signal. A first laser source radiates a first pulse laser beam having a wavelength in an ultraviolet range, synchronously with the first event signal. A second laser source radiates a second pulse laser beam having a wavelength in the ultraviolet range, synchronously with the second event signal. A converging optical system converges the first and second pulse laser beams at the same point. A holder holds a workpiece at a position where a pulse laser beam converged by the converging optical system is applied.
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