Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same
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United States of America Patent
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Mar 23, 2004
Grant Date -
Jan 16, 2003
app pub date -
Jul 13, 2001
filing date -
Jul 13, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus having both a resonator and an inductor fabricated on a single substrate and a method of fabricating the apparatus are disclosed. The apparatus includes a resonator and an inductor that is connected to the resonator. Both the resonator and the inductor are fabricated over their respective cavities to produce a high Q-factor filter circuit.
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