Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card
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United States of America Patent
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Mar 23, 2004
Grant Date -
N/A
app pub date -
Mar 9, 1999
filing date -
Mar 9, 1999
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Abstract
A probe card inspection system uses a fiduciary plate having a plurality of targets deposited thereon by photolithography and vapor deposition. A plurality of semiconductor probe card probe tips are contacted with the fiducial pattern on the plate. An electronic imaging system determines the position of geometric centroids of the probe tips with respect to an index mark in the fiducial pattern. A central processor determines the position of each imaged probe tip(s) with respect to the index mark, and calculates the relative positions of each probe tip from that data.
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