Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method
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United States of America Patent
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Mar 23, 2004
Grant Date -
Mar 7, 2002
app pub date -
Sep 4, 2001
filing date -
Sep 7, 2000
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Abstract
A method for calibrating a lithographic projection apparatus includes identifying a set of two or more reference positions of one a first and a second object table WTa, WTb or MT with a first detection system and simultaneously measuring those reference positions with a first position measuring system, identifying the same set of reference positions of said one object table with a second detection system and simultaneously measuring those reference positions with a second position measuring system, and correlating said first and said second position measuring systems using the measurements of the reference positions.
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