Controlling micro-electro-mechanical cavities
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United States of America Patent
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Mar 23, 2004
Grant Date -
Oct 17, 2002
app pub date -
Feb 13, 2002
filing date -
May 5, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
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