Method and apparatus for generating X-ray or EUV radiation
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United States of America Patent
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Mar 23, 2004
Grant Date -
Feb 7, 2002
app pub date -
Jul 23, 2001
filing date -
Jul 28, 2000
priority date (Note) -
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Abstract
In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.
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