Web based tool control in a semiconductor fabrication facility
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United States of America Patent
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Mar 23, 2004
Grant Date -
Jul 18, 2002
app pub date -
Aug 23, 2001
filing date -
Aug 23, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
In brief, the present invention provides a system for the interconnection of semiconductor fabrication tools ('process tools') in a semiconductor fabrication facility by use of a data network and microprocessor based interface ('browser') associated with each process tool. The data network and microprocessor based interface provide communication in accordance with known standards via Intranet or Internet data transfer links to one or more remotely disposed browsers. Data is immediately available in real time on all aspects of the operation of the fabrication facility. Equipment engineers and process engineers can browse the various process tools from any location. Host communications to and from the tools can be monitored without affect on factory operation. The interface is compatible with standard process tools and factory automation or management software systems.
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